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Process Optimization for Multiple-Pulses Laser Annealing for Boron Implanted Silicon with Germanium Pre-amorphization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 765 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, D6.19
- Print publication:
- 2003
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Activation of Beryllium-Implanted GaN by Two-Step Annealing
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- Journal:
- Materials Research Society Internet Journal of Nitride Semiconductor Research / Volume 5 / Issue S1 / 2000
- Published online by Cambridge University Press:
- 13 June 2014, pp. 315-321
- Print publication:
- 2000
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- Article
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Activation of Beryllium-Implanted GaN by Two-Step Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 595 / 1999
- Published online by Cambridge University Press:
- 03 September 2012, F99W3.82
- Print publication:
- 1999
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- Article
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